Nanocrystal seeding: A low temperature route to polycrystalline Si films
نویسنده
چکیده
A novel method is presented for growth of polycrystalline silicon films on amorphous substrates at temperatures of 540-575 “C. Grain nucleation and grain growth are performed in two steps, using Si nanocrystals as nuclei (“sceds’“,L The nanocrystal seeds are produced by excimer laser photolysis of disilane in a room temperature flow cell. Film (grain) growth occurs epitaxially on the seeds in a separate thermal chemical vapor deposition (CVD) step, with growth rates 10-100 times higher than similar CVD growth rates on crystal Si. Grain size and CVD growth rates are dependent on seed coverage, for seed coverage <0.2 monolayers.
منابع مشابه
Si/ZnO NANO STRUCTURED HETEROJUNCTIONS BY APCVD METHOD
In this paper, polycrystalline pure zinc oxide nano structured thin films were deposited on two kinds of single crystal and polycrystalline of p and n type Si in three different substrate temperatures of 300, 400 and 500◦C by low cost APCVD method. Structural, electrical and optical properties of these thin films were characterized by X ray diffraction, two point probe method and UV visible spe...
متن کاملLow Temperature Polysilicon Thin-Film Transistors on Flexible Substrates
We fabricated low-temperature polycrystalline silicon thin-film transistors (poly-Si TFTs) on flexible substrates using sputtered amorphous Si (a-Si) precursor films. The a-Si precursor films were deposited by using rf-magnetron sputtering system with argon-helium mixture gas to minimize the argon incorporation into the Si film. The a-Si films were laser annealed by using XeCl excimer laser and...
متن کاملFacile solution route to vertically aligned, selective growth of ZnO nanostructure arrays.
For any future cost-effective applications of inorganic nanostructures, in particular, hybrid photovoltaic cells, it is essential that these inorganic nanomaterials be solution processable and selectively printable. This letter reports the selective growth of single-crystal ZnO nanostructures based on the microcontact printing of an inorganic nanocrystal seeding film. The pattern-transfer quali...
متن کاملA PHOTO-INDUCED MEMORY EFFECT OBSERVED ON In-Si-Se SYSTEM
A photo-induced memory effect (a phenomenon similar to the persistent photoconductivity) was found in the photoinduced polycrystalline films of the In-Si-Se system. The photo-induced polycrystalline process was performed by irradiating the specimen ( the light intensity is 6 m~/cm2) at temperature 70°C. The conductivity drastically increased by irradiation of the light pulse (its intensity is 2...
متن کاملPolycrystalline Si thin films and devices: I. Seed selection through ion channeling II. Thin-film transistors
Part I of this thesis investigates the ."seed selection through ion channeling" process, employed to modify the grain size and crystallographic texture of polycrystalline Si thin films deposited on SiO 2. In each of the three experiments, polycrystalline Si films prepared by the low-pressure chemical-vapor deposition technique were used as the starting material. Si self-implantation, at a fixed...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 1999